Microsystems for Chemical and Biological Applications
- 1 April 2001
- journal article
- Published by Springer Nature in MRS Bulletin
- Vol. 26 (4) , 333-336
- https://doi.org/10.1557/mrs2001.75
Abstract
Over the past decade, there has been an explosive growth in efforts directed at developing and utilizing an array of novel microsystems in important applications in chemistry and biology. In parallel, the commercial potential of these applications has fueled the creation of hundreds of new companies and the expansion of research and development efforts at established commercial organizations. In this article, we outline the spectrum of applications of these systems and highlight some of the materials and fabrication challenges that they present.Keywords
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