Hazards from radio-frequency and laser equipment in the manufacture of. cap alpha. -Si photovoltaic cells
- 1 April 1985
- report
- Published by Office of Scientific and Technical Information (OSTI)
Abstract
In the manufacture of ..cap alpha..-Si thin film photovoltaic cells, electrical and electromagnetic fields generated from process equipment may present occupational hazards. Radio-frequency plasma deposition and sputtering equipment may emit nonionizing radiation into the occupational workspace. Laser scribing equipment may present electrical shock hazards to employees. Hazards associated with these two types of equipment are characterized in reference to their potential to cause health effects or injury, workers exposed, and the environment in which they operate.Keywords
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