DC Conduction in Si3N4Films Grown by the Pyrolytic Reaction between Silane and Ammonia

• 1 November 1978
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 17  (11) , 1953-1957
• https://doi.org/10.1143/jjap.17.1953

Abstract

Keywords

• DC CONDUCTION
• AMMONIA
• PYROLYTIC REACTION
• SILANE
• SI3N4FILMS GROWN
• CONDUCTION IN SI3N4FILMS