Single-source CVD routes to titanium phosphide
- 28 May 2002
- journal article
- research article
- Published by Royal Society of Chemistry (RSC) in J. Chem. Soc., Dalton Trans.
- No. 13,p. 2702-2709
- https://doi.org/10.1039/b203613b
Abstract
Treatment of TiCl4 with two equivalents of L (L = PhPH2, Ph2PH, PPh3, CyPH2, Cy2PH, PCy3) resulted in the formation of [TiCl4(L)2]. Reaction of TiCl4 with a stoichiometric amount of 1,2-bis(diphenylphosphino)methane (dppm), 1,2-bis(diphenylphosphino)ethane (dppe) and 1,2-bis(diphenylphosphino)propane (dppp) affords [TiCl4(dppm)], [TiCl4(dppe)] and [TiCl4(dppp)], respectively. X-Ray crystal structures of [TiCl4(Cy2PH)2] (5) and [TiCl4(dppe)] (9) have been determined. Low pressure chemical vapour deposition (LPCVD) studies of all the compounds revealed that [TiCl4(L)2] (L = CyPH2, Cy2PH and PCy3) and [TiCl4(dppm)] can form titanium phosphide thin-films on glass.Keywords
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