Highly transparent and conductive rare earth-doped ZnO thin films prepared by magnetron sputtering
- 1 May 2000
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 366 (1-2) , 63-68
- https://doi.org/10.1016/s0040-6090(00)00731-8
Abstract
No abstract availableKeywords
Funding Information
- Ministry of Education, Culture, Sports, Science and Technology
This publication has 22 references indexed in Scilit:
- 4.1:Invited Paper:Full‐Color Organic EL DisplaySID Symposium Digest of Technical Papers, 1998
- 34.2: High‐Luminance Thin‐Film EL Devices Using Mn‐Activated Multicomponent Oxide PhosphorsSID Symposium Digest of Technical Papers, 1998
- Surface Flatness of Transparent Conducting ZnO:Ga Thin Films Grown by Pulsed Laser DepositionJapanese Journal of Applied Physics, 1996
- Transparent Conducting Al-Doped ZnO Thin Films Prepared by Pulsed Laser DepositionJapanese Journal of Applied Physics, 1996
- Deposition of Boron Doped Zinc Oxide Films and Their Electrical and Optical PropertiesJournal of the Electrochemical Society, 1992
- Conduction mechanism of highly conductive and transparent zinc oxide thin films prepared by magnetron sputteringJournal of Crystal Growth, 1992
- Effect of Water Vapor on the Growth of Textured ZnO-Based Films for Solar Cells by DC-Magnetron SputteringJapanese Journal of Applied Physics, 1991
- Effect of applied external magnetic field on the relationship between the arrangement of the substrate and the resistivity of aluminium-doped ZnO thin films prepared by r.f. magnetron sputteringThin Solid Films, 1988
- Group III Impurity Doped Zinc Oxide Thin Films Prepared by RF Magnetron SputteringJapanese Journal of Applied Physics, 1985
- Highly Conductive and Transparent Aluminum Doped Zinc Oxide Thin Films Prepared by RF Magnetron SputteringJapanese Journal of Applied Physics, 1984