ENERGETIC CLUSTER IMPACT (ECI): A NEW METHOD FOR THIN-FILM FORMATION

• 1 February 1996
• journal article
• conference paper
• Published by World Scientific Pub Co Pte Ltd in Surface Review and Letters
• Vol. 03  (01) , 887-890
• https://doi.org/10.1142/s0218625x96001595

Abstract

Keywords

• THIN FILM
• NUMERICAL SIMULATION
• KINETIC ENERGY