Sputtering

• 29 March 1996
• book chapter
• Published by Cambridge University Press (CUP)
• p. 218-253
• https://doi.org/10.1017/cbo9780511565007.010

Abstract

Keywords

• ENERGY
• COMPUTER SIMULATION
• THRESHOLD ENERGY
• CONDENSED MATTER PHYSICS
• ION IMPLANTATION
• SPUTTERING
• MATERIALS SCIENCE
• CONCENTRATION
• YIELD