Selective epitaxy using silane and germane

• 1 January 1971
• journal article
• Published by Elsevier in Journal of Crystal Growth
• Vol. 8  (1) , 33-36
• https://doi.org/10.1016/0022-0248(71)90019-4

Abstract

Keywords

• EPITAXY USING SILANE
• SELECTIVE EPITAXY
• SILANE AND GERMANE