On the recrystalization behaviour of rare earth oxide thin films

Abstract
Recrystallization behaviour of thin rare earth oxide films Er2O3, HO2O3 and Dy2O3 has been investigated. Recrystallization is induced in these films by the electron beam heating in local areas (pulse annealing) in the electron microscope. In these films recrystallization resembles that observed in the bulk specimens and is also similar to the recrystallization behaviour observed in the case of metals.