Diffusion of acid and activation energy of positive chemical amplification resist.

• 1 January 1993
• journal article
• Published by Technical Association of Photopolymers, Japan in Journal of Photopolymer Science and Technology
• Vol. 6  (4) , 505-514
• https://doi.org/10.2494/photopolymer.6.505

Abstract

Keywords

• ACTIVATION ENERGY