Point of Use Regeneration of Oxide Chemical Mechanical Planarization Slurry by Filtrations

• 15 November 2002
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 41  (Part 1, No) , 6342-6346
• https://doi.org/10.1143/jjap.41.6342

Abstract

Keywords

• CHEMICAL MECHANICAL
• USE REGENERATION
• OXIDE CHEMICAL
• POINT
• MECHANICAL PLANARIZATION SLURRY