Evaluation of Fracture and Fatigue Strength of Single-Crystal Silicon Microelements and Influence of Water.

1 January 1996

journal article
Published by Japan Society of Mechanical Engineers in TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series A

Vol. 62 (596) , 978-984
https://doi.org/10.1299/kikaia.62.978

Abstract

Quasi-static and fatigue tests of single-crystal silicon microelements fabricated by micromachining (photoetching) were performed. The cantilever-beam microelements were subjected to simple bending using a specially designed testing machine. Extremely small loads could be applied to a microelement by means of an electromagnetic actuator, and quasi-static and fatigue tests could thereby by performed with sufficient precision. Silicon microelements deformed elastically until final catastrophic failure, giving a brittle nature. The fracture strengths increased with decreasing specimen size. Fatigue tests were performed, and the influence of water on fatigue strength was discussed. The fracture surface and sample surface were examined in detail using a scanning electron microscope (SEM) and an atomic force microscope (AFM), and the fracture mechanisms were discussed.

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