Morphology of thin silver film grown by dc sputtering on Si(001)
- 7 December 1998
- journal article
- research article
- Published by IOP Publishing in Journal of Physics D: Applied Physics
- Vol. 31 (23) , L73-L77
- https://doi.org/10.1088/0022-3727/31/23/001
Abstract
The morphology and growth mechanism of silver films approximately 150 Å in thickness on Si(001) substrates have been studied by atomic force microscopy and x-ray reflectivity. The thin films prepared by dc sputtering at room temperature are composed of islands of silver. The shape and size distribution of these islands are studied using these two complementary measurement techniques.Keywords
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