Adsorption and thermal desorption of chlorine from GaAs(100) surfaces

• 1 November 1992
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 10  (6) , 2371-2377
• https://doi.org/10.1116/1.586070

Abstract

Keywords

• THERMAL DESORPTION
• ADSORPTION AND THERMAL
• SURFACES
• CHLORINE FROM GAAS
• DESORPTION OF CHLORINE