Calibration of standards for precision pitch measurement in the nanometre region by combined scanning tunnelling microscopy and x-ray interferometry
- 1 December 1999
- journal article
- Published by IOP Publishing in Nanotechnology
- Vol. 10 (4) , 412-417
- https://doi.org/10.1088/0957-4484/10/4/309
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- The silicon lattice parameter - an invariant quantity of nature?Metrologia, 1998
- The feasibility of extended range monolithic X-ray interferometric calibratorsNanotechnology, 1993
- AN X-RAY INTERFEROMETERApplied Physics Letters, 1965