Effects of Diffusion‐Induced Strain and Dislocation on Phosphorus Diffusion into Silicon

• 1 November 1978
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 125  (11) , 1840-1845
• https://doi.org/10.1149/1.2131307

Abstract

Keywords

• PHOSPHORUS
• DISLOCATIONS