Bonded silicon-on-sapphire wafers and devices
- 15 September 1992
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 72 (6) , 2526-2527
- https://doi.org/10.1063/1.352345
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- Bonding of silicon wafers for silicon-on-insulatorJournal of Applied Physics, 1988
- Silicon as a mechanical materialProceedings of the IEEE, 1982
- Improvement of SOS Device Performance by Solid-Phase EpitaxyJapanese Journal of Applied Physics, 1982
- A New Preferential Etch for Defects in Silicon CrystalsJournal of the Electrochemical Society, 1977