Analysis of thin-film-dielectric decoupling of interdigital transducers

Publisher Website
Google Scholar
Abstract
A perturbation analysis is presented for the reduction in the coupling coefficient ΔV/V of an interdigital transducer that is spaced away from the surface of a piezoelectric substrate by a thin isotropic nonpiezoelectric dielectric film. The analysis shows that the static capacitance and coupling ΔV/V are reduced rapidly by the addition of thin dielectric films, while the series radiation resistance is relatively insensitive to film thickness for films less than approximately 0.03 wavelengths.

This publication has 0 references indexed in Scilit: