Conformal Coating on Ultrahigh-Aspect-Ratio Nanopores of Anodic Alumina by Atomic Layer Deposition
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- 14 August 2003
- journal article
- research article
- Published by American Chemical Society (ACS) in Chemistry of Materials
- Vol. 15 (18) , 3507-3517
- https://doi.org/10.1021/cm0303080
Abstract
No abstract availableKeywords
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