Definitive pressure generation in the 10−4–10−3 Torr range for atomic scattering experiments
- 1 May 1976
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science and Technology
- Vol. 13 (3) , 721-727
- https://doi.org/10.1116/1.568976
Abstract
A pressure generation technique using the dynamic expansion method is described. Measurements and uncertainties are discussed, and it is shown that the method provides a convenient means for obtaining accurate pressures in the 10−3–10−4 Torr range. High confidence uncertainties as low as about ±1% are achieved.Keywords
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