Surface acoustic wave microsensors using diffused substrates
Open Access
- 1 June 1988
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Electron Devices
- Vol. 35 (6) , 744-749
- https://doi.org/10.1109/16.2526
Abstract
No abstract availableThis publication has 21 references indexed in Scilit:
- Surface acoustic wave gas sensor based on film conductivity changesSensors and Actuators, 1985
- Mechanism of operation and design considerations for surface acoustic wave device vapour sensorsSensors and Actuators, 1984
- Poly(ethylene maleate)-cyclopentadiene: a model reactive polymer-vapor system for evaluation of a SAW microsensorAnalytical Chemistry, 1984
- SAW Properties of SiO2/128° Y-X LiNb03Structure Fabricated by Magnetron Sputtering TechniqueIEEE Transactions on Sonics and Ultrasonics, 1984
- Surface acoustic wave hydrogen sensorSensors and Actuators, 1982
- Sensors Utilizing Thin-Membrane SAW OscillatorsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1981
- Surface acoustic waveguides on LiNbO3 formed by titanium in-diffusionApplied Physics Letters, 1977
- Acoustic surface wave velocity perturbations in LiNbO3 by diffusion of metalsApplied Physics Letters, 1975
- Thin Fiim Acoustic Surface Waveguides on Anisotropic MediaIEEE Transactions on Sonics and Ultrasonics, 1975
- Attenuation of Microwave Acoustic Surface Waves Due to Gas LoadingJournal of Applied Physics, 1972