Compositionally Dependent Si 2p Binding Energy Shifts in Silicon Oxynitride Thin Films
- 1 April 1986
- journal article
- Published by Wiley in Journal of the American Ceramic Society
- Vol. 69 (4) , 314-316
- https://doi.org/10.1111/j.1151-2916.1986.tb04738.x
Abstract
No abstract availableKeywords
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