Application of neutron activation analysis in the field of silicon technology for the modern electronic industry
- 1 July 1987
- journal article
- Published by Springer Nature in Journal of Radioanalytical and Nuclear Chemistry
- Vol. 113 (2) , 397-403
- https://doi.org/10.1007/bf02050513
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- A Neutron Activation Analysis Study of the Sources of Transition Group Metal Contamination in the Silicon Device Manufacturing ProcessJournal of the Electrochemical Society, 1981
- ko-measurements and related nuclear data compilation for (n, γ) reactor neutron activation analysisJournal of Radioanalytical and Nuclear Chemistry, 1980
- Some practical procedures in computerized thermal neutron activation analysis with Ge(Li) gamma-ray spectrometryJournal of Radioanalytical and Nuclear Chemistry, 1977