Aluminium spearing in silicon integrated circuits
- 30 November 1973
- journal article
- research article
- Published by Elsevier in Solid-State Electronics
- Vol. 16 (11) , 1303-1304
- https://doi.org/10.1016/0038-1101(73)90088-9
Abstract
No abstract availableThis publication has 1 reference indexed in Scilit:
- Precipitation of Si from the Al Metallization of Integrated CircuitsApplied Physics Letters, 1972