Surface and subsurface composition changes in NiSi alloys during elevated-temperature sputtering
- 31 January 1988
- journal article
- Published by Elsevier in Surface Science
- Vol. 193 (3) , 353-372
- https://doi.org/10.1016/0039-6028(88)90441-4
Abstract
No abstract availableThis publication has 13 references indexed in Scilit:
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