Advanced electron cyclotron resonance chemical vapor deposition SiC coatings and x-ray mask membranes
- 1 November 1991
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 9 (6) , 3258-3261
- https://doi.org/10.1116/1.585299
Abstract
No abstract availableKeywords
This publication has 0 references indexed in Scilit: