Anomalous near-surface effects in room temperature implanted germanium
- 15 May 1983
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research
- Vol. 209-210, 303-307
- https://doi.org/10.1016/0167-5087(83)90815-3
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Characterization of damage in ion implanted GeApplied Physics Letters, 1982
- The effects of self-ion bombardment (30–500 keV) on the surface topography of single-crystal germaniumJournal of Applied Physics, 1982
- The application of high-resolution Rutherford backscattering techniques to near-surface analysisNuclear Instruments and Methods, 1978