Pulsed-laser time-of-flight atom-probe field ion microscope
- 1 September 1982
- journal article
- conference paper
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 53 (9) , 1442-1448
- https://doi.org/10.1063/1.1137193
Abstract
A linear-type pulsed-laser time-of-flight atom probe has been developed. With a flight path length of ∼200 and ∼425 cm, the mass resolution is comparable to the energy focused time-of-flight atom probe of much more elaborate mechanical and electrical design. The isotopes of Mo, Xe, and W are completely separated to the roots of the mass lines. We also discuss how the mass resolution of the pulsed-laser atom probe can be further improved and where this instrument will be useful.Keywords
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