Phase formation in the interfacial reactions of ultrahigh vacuum deposited titanium thin films on (111)Si
- 15 June 1992
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 71 (12) , 5918-5925
- https://doi.org/10.1063/1.350441
Abstract
No abstract availableThis publication has 37 references indexed in Scilit:
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