High-Energy Ion Beam Analysis of YBa2Cu3Ox Thin Films
- 1 March 1989
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 28 (3R)
- https://doi.org/10.1143/jjap.28.346
Abstract
The composition and crystalline structure of high-T c superconducting YBa2Cu3O x thin films formed on MgO(100) and Si(100) substrates have been investigated by Rutherford backscattering and channeling techniques. Y, Ba, Cu contents have been analyzed by employing a high-energy (over 4.5 MeV) 4He ions and large scattering angle (near 170°) condition, where Y, Ba and Cu peaks are clearly separated from each other. Oxygen concentration has been obtained through the use of low primary energy (below 2.5 MeV) and small scattering angle (below 150°) conditions, where the O peak is separated from the background. The crystalline quality of the films has also been investigated by ion channeling techniques.Keywords
This publication has 7 references indexed in Scilit:
- Structural change of Si(100) and (111) surfaces after Ag deposition studied by MeV ion channelingApplied Surface Science, 1988
- High-energy elastic backscattering of helium ions for compositional analysis of high-temperature superconductor thin filmsApplied Physics Letters, 1988
- Ion beam analysis of oxygen distribution in superconducting YBa2Cu3OxApplied Physics Letters, 1988
- Superconducting Y-Ba-Cu-O oxide films by sputteringApplied Physics Letters, 1987
- Crystal structure of the high- superconductorPhysical Review B, 1987
- Superconductivity at 93 K in a new mixed-phase Y-Ba-Cu-O compound system at ambient pressurePhysical Review Letters, 1987
- Evidence for superconductivity above 40 K in the La-Ba-Cu-O compound systemPhysical Review Letters, 1987