Interferometric angle encoder
- 1 May 1991
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 62 (5) , 1356-1360
- https://doi.org/10.1063/1.1142499
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- The design and application of a novel high-frequency tiltmeterReview of Scientific Instruments, 1990
- Hexflash Phase Analysis ExamplesPublished by SPIE-Intl Soc Optical Eng ,1989
- Optical homodyne phase metrologyApplied Optics, 1989
- Complex interferometryApplied Optics, 1983