Dynamics of uv excimer laser ablation of pmma, caused by mechanical stresses theory and experiment
- 1 August 1990
- journal article
- research article
- Published by Wiley in Makromolekulare Chemie. Macromolecular Symposia
- Vol. 37 (1) , 257-267
- https://doi.org/10.1002/masy.19900370122
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Evidence for the Thermal Nature of Laser-Induced Polymer AblationPhysical Review Letters, 1987
- Ablation of Polymers and Biological Tissue by Ultraviolet LasersScience, 1986
- Laser ablation of polymersJournal of Vacuum Science & Technology A, 1986
- Mechanism of the ultraviolet laser ablation of polymethyl methacrylate at 193 and 248 nm: laser-induced fluorescence analysis, chemical analysis, and doping studiesJournal of the Optical Society of America B, 1986
- Excimer laser etching of polyimideJournal of Applied Physics, 1985