Copper CVD chemistry on a reactive substrate: bis(hexafluoroacetylacetonato)copper and hfacH on platinum (111)
- 1 November 1993
- journal article
- Published by American Chemical Society (ACS) in The Journal of Physical Chemistry
- Vol. 97 (44) , 11530-11541
- https://doi.org/10.1021/j100146a030
Abstract
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