Technologies and Microstructures for (Bio)chemical Microsystems
- 1 January 1998
- book chapter
- Published by Springer Nature
Abstract
No abstract availableKeywords
This publication has 11 references indexed in Scilit:
- A survey on the reactive ion etching of silicon in microtechnologyJournal of Micromechanics and Microengineering, 1996
- Microflow devices and systemsJournal of Micromechanics and Microengineering, 1994
- Microfluidics-a reviewJournal of Micromechanics and Microengineering, 1993
- Micro liquid handling using a flow-regulated silicon micropumpJournal of Micromechanics and Microengineering, 1993
- Micro-liquid flow sensorSensors and Actuators A: Physical, 1993
- A substrate for thin-film gas sensors in microelectronic technologySensors and Actuators B: Chemical, 1990
- Miniaturized total chemical analysis systems: A novel concept for chemical sensingSensors and Actuators B: Chemical, 1990
- Laminar-flow bolus shapes in flow injection analysisAnalytica Chimica Acta, 1986
- Chemical Etching of Silicon: IV . Etching TechnologyJournal of the Electrochemical Society, 1976
- Laminar dispersion in capillaries: Part IV. The slug stimulusAIChE Journal, 1967