Microlithographic patterning of polythiophene films
- 1 March 1993
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 73 (5) , 2602-2604
- https://doi.org/10.1063/1.354077
Abstract
Lithographic patterning of micrometer scale structures in films of polythiophene, an organic material with good linear and nonlinear χ(3)optical properties, has been accomplished by two methods: direct deposition of polythiophene in SiO2 trenches and an oxygen plasmaetch of polythiophene through a spin‐on glass mask.This publication has 7 references indexed in Scilit:
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