Microlithographic patterning of polythiophene films

Abstract
Lithographic patterning of micrometer scale structures in films of polythiophene, an organic material with good linear and nonlinear χ(3)optical properties, has been accomplished by two methods: direct deposition of polythiophene in SiO2 trenches and an oxygen plasmaetch of polythiophene through a spin‐on glass mask.