The elastic biaxial modulus of Ag–Pd multilayered thin films measured using the bulge test
- 1 January 1994
- journal article
- Published by Springer Nature in Journal of Materials Research
- Vol. 9 (1) , 25-30
- https://doi.org/10.1557/jmr.1994.0025
Abstract
Analysis and sample preparation techniques for the bulge test have been improved to the point where the test can provide reliable and accurate measurements of the mechanical properties of thin films. Ag-Pd multilayer films of variable bilayer period were prepared for this study and characterized by cross-section transmission electron microscopy and by x-ray methods. The films were tested in the bulge test to determine their biaxial moduli. The data show no peak in biaxial modulus at a critical composition wavelength and no nonlinear elastic behavior. They do show a slight trend toward increasing elastic modulus with increasing strength of (111) crystallographic texture. These findings refute a previous report of the “supermodulus” effect in this system and add to the evidence that the effect is caused by artifacts of the mechanical testing technique. Methods for eliminating such artifacts are discussed.Keywords
This publication has 8 references indexed in Scilit:
- A new bulge test technique for the determination of Young's modulus and Poisson's ratio of thin filmsJournal of Materials Research, 1992
- Analysis of the accuracy of the bulge test in determining the mechanical properties of thin filmsJournal of Materials Research, 1992
- Elastic and nanostructural properties of Cu/Pd superlatticesJournal of Materials Research, 1992
- An apparatus for studying sputter deposition with x raysReview of Scientific Instruments, 1992
- The mechanical properties and microstructure of plasma enhanced chemical vapor deposited silicon nitride thin filmsJournal of Vacuum Science & Technology A, 1991
- Elastic modulus in composition-modulated copper-nickel foilsJournal of Applied Physics, 1983
- Elastic modulus in composition-modulated silver-palladium and copper-gold foilsJournal of Applied Physics, 1983
- Enhanced elastic modulus in composition-modulated gold-nickel and copper-palladium foilsJournal of Applied Physics, 1977