Beam-diameter correction of x-ray intensity profile over small diffusion zones
- 1 November 1975
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 46 (11) , 5004-5009
- https://doi.org/10.1063/1.321473
Abstract
The spatial broadening, due to the effective electron beam diameter, of an x-ray intensity profile as measured with a scanning electron microscope is corrected by the Fourier method. A technique is presented whereby a convergent series solution is obtained by adjusting the measured data within its random uncertainty. A numerical example along with two experimental results are presented to illustrate the method.This publication has 12 references indexed in Scilit:
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