A monitoring and diagnostics system for a plasma etching cell

Publisher Website

9 December 2002

conference paper
Published by Institute of Electrical and Electronics Engineers (IEEE)

https://doi.org/10.1109/asmc.1991.167382

Abstract

No abstract available

This publication has 2 references indexed in Scilit:

A generic cell controller for the automated VLSI manufacturing facility
IEEE Transactions on Semiconductor Manufacturing, 1992
An organization and interface for sensor-driven semiconductor process control systems
IEEE Transactions on Semiconductor Manufacturing, 1990