Measurement of acoustic properties of liquids using SH-type surface acoustic waves
- 4 December 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
A surface acoustic wave (SAW) viscosity sensor for liquid phase sensing utilizing a shear horizontal displacement of a leaky SAW is presented. The sensor is based on a dual SAW delay line oscillator. Leaky SAWs with shear horizontal displacement were excited on a 41 degrees -rotated Y-cut X-propagation LiNbO/sub 3/ substrate by using interdigital transducers (IDTs). It is shown that the viscosity sensor has a sensitivity of about 80 Hz/cP at an operating frequency of 30 MHz, with a threshold sensitivity of about 1 cP.<>Keywords
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