Subsurface damage in single-crystal silicon due to grinding and polishing
- 1 January 1996
- journal article
- research article
- Published by Springer Nature in Journal of Materials Science Letters
- Vol. 15 (7) , 586-587
- https://doi.org/10.1007/bf00579258
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Fabrication and Sphericity Measurements of Single-crystal Silicon SpheresMetrologia, 1994
- Fracture of Brittle SolidsPublished by Cambridge University Press (CUP) ,1993
- Slip and Twinning Systems in Ceramic CrystalsPublished by Springer Nature ,1975