CVD of BaF2 with new stable and volatile complexes of barium(II)

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Abstract
The new β-diketone, 1,1,1,2,2,3,3,7,7,8,8,9,9,9-tetradecafluorononane-4,6-dione (HTDFND) has been prepared and employed in the formation of a complex of Ba. A complex of the same metal derived from the β-diketone, 1,1,1,2,2,3,3,7,7,7,-decafluoroheptane-2,4-dione (HDFHD) has also been prepared. The compounds have the formula [ M(TDFND)2H2O] or [ M(DHFD)2H2O] . The complexes have been characterised by analytical and spectroscopic means. Simultaneous thermal analysis at one atmosphere reveals that the compounds lose water but then sublime, and in the case of [ Ba(TDFND)2H2O] without any decomposition. [ Ba(TDFND)2H2O] is the first barium complex for which this is the case and it can be dehydrated to give [ Ba(TDFND)2] which is also volatile. This suggests that [ Ba(TDFND)2H2O] could be a suitable precursor for the CVD growth of BaF2. This has been investigated. On silicon substrates complete orientation in the (111) direction is observed. Changes in the film growth rate with time are attributed to slow reorganisation of the crystal structure of [ Ba(TDFND)2]

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