Design, fabrication and vapor characterization of a microfabricated flexural plate resonator sensor and application to integrated sensor arrays
- 1 March 2001
- journal article
- Published by Elsevier in Sensors and Actuators B: Chemical
- Vol. 73 (2-3) , 112-123
- https://doi.org/10.1016/s0925-4005(00)00664-x
Abstract
No abstract availableKeywords
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