Miniature quadrupole residual gas analyzer for process monitoring at milliTorr pressures
- 1 May 1998
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 16 (3) , 1157-1162
- https://doi.org/10.1116/1.581251
Abstract
No abstract availableThis publication has 7 references indexed in Scilit:
- High-pressure effects in miniature arrays of quadrupole analyzers for residual gas analysis from 10−9 to 10−2 TorrJournal of Vacuum Science & Technology A, 1996
- Nonlinearities in sensitivity of quadrupole partial pressure analyzers operating at higher gas pressuresJournal of Vacuum Science & Technology A, 1994
- Recommended Practice for the Calibration of Mass SpectrometersJournal of Vacuum Science & Technology A, 1993
- Collisional focusing effects in radio frequency quadrupolesPublished by American Chemical Society (ACS) ,1992
- Mass-dependent effects of channel electron multipliers in residual gas analyzersJournal of Vacuum Science & Technology A, 1987
- Improvements to small quadrupole mass spectrometersInternational Journal of Mass Spectrometry and Ion Processes, 1984
- Das elektrische Massenfilter als Massenspektrometer und IsotopentrennerZeitschrift für Physik, 1958