Mechanical properties of thin alloy films: Ultramicrohardness and internal stress
- 15 June 1984
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 55 (12) , 4248-4256
- https://doi.org/10.1063/1.333027
Abstract
No abstract availableThis publication has 14 references indexed in Scilit:
- Internal stresses in Cr, Mo, Ta, and Pt films deposited by sputtering from a planar magnetron sourceJournal of Vacuum Science and Technology, 1982
- Mechanical properties of optical filmsThin Solid Films, 1982
- Micromechanics of films, fibrils and interfaces—an overviewThin Solid Films, 1982
- Interaction of O2, CO, H2O, H2 and N2 with thin chromium films studied by internal stress measurementsThin Solid Films, 1982
- Some measurements of hardness, wear and stresses in ion implanted thin metallic filmsNuclear Instruments and Methods, 1981
- Ultramicrohardness tester for use in a scanning electron microscopeColloid and Polymer Science, 1981
- The hardness and ductility of sputtered gold filmsThin Solid Films, 1979
- Ultra-microhardness of vacuum-deposited films II: Results for silver, gold,copper, MgF2, LiF and ZnSThin Solid Films, 1978
- Ultra-microhardness of vacuum-deposited films I: Ultra-microhardness testerThin Solid Films, 1978
- The effect of composition and ordering on adhesion in some binary solid solution alloy systemsWear, 1969