Knife-edge thin film field emission cathodes on (110) silicon wafers

• 1 March 1994
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 12  (2) , 644-647
• https://doi.org/10.1116/1.587404

Abstract

Keywords

• QUANTUM MECHANICS
• FIELD EMISSION
• SILICON WAFER
• THIN FILM