An electrostatically actuated gas valve with an S-shaped film element
- 1 December 1994
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 4 (4) , 205-209
- https://doi.org/10.1088/0960-1317/4/4/005
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- The design and fabrication of a magnetically actuated micromachined flow valveSensors and Actuators A: Physical, 1990