Photo-Induced ESR in Amorphous C:H Films Prepared by Glow Discharge Decomposition of CH4 and H2
- 1 February 1985
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 24 (2A) , L122-124
- https://doi.org/10.1143/jjap.24.l122
Abstract
Hydrogenated amorphous carbon films with a high content of sp3 bonds were prepared by a glow-discharge-decomposition of CH4 and H2 mixture. With exposure to light at 77 K, the films exhibit a new ESR signal with g=2.011 and a half width of 23 G in addition to an enhancement of the signal at g=2.003 due to C dangling bonds. The new signal is attributable to trapped holes in the valence-band-tail-state, and its density decreases with increasing hydrogen content in the film.Keywords
This publication has 9 references indexed in Scilit:
- Tetrahedral carbon film by hydrogen gas reactive rf-sputtering of graphite onto low temperature substrateSolid State Communications, 1984
- Preparation of sp3-Rich Amorphous Carbon Film by Hydrogen Gas Reactive RF-Sputtering of Graphite, and Its PropertiesJapanese Journal of Applied Physics, 1984
- Photoluminescence in glow discharge a-C:H filmsJournal of Non-Crystalline Solids, 1983
- Bonding in hydrogenated hard carbon studied by optical spectroscopySolid State Communications, 1983
- Photoluminescence of Hydrogenated Amorphous Carbon FilmsJapanese Journal of Applied Physics, 1982
- Properties of hydrogenated carbon films produced by reactive magnetron sputteringSolar Energy Materials, 1981
- Luminescence and ESR studies of defects in hydrogenated amorphous siliconSolid State Communications, 1980
- Electrical and optical properties of hydrogenated amorphous carbon filmsJournal of Non-Crystalline Solids, 1980
- Carbon coatings for fusion applicationsThin Solid Films, 1979