Activation Energies in the Chemical Etching of Semiconductors in HNO[sub 3]-HF-CH[sub 3]COOH
- 1 January 1967
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 114 (9) , 970
- https://doi.org/10.1149/1.2426794
Abstract
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