Anomalous sheath heating in a low pressure rf discharge in nitrogen
- 14 December 1992
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review Letters
- Vol. 69 (24) , 3511-3514
- https://doi.org/10.1103/physrevlett.69.3511
Abstract
We have determined the electron energy distribution function (EEDF) in a low pressure nitrogen rf discharge both experimentally and using a computer simulation. The EEDFs show unusual structures, which can be interpreted in terms of a sheath-oscillation electron heating mechanism. However, the simulation shows that contrary to the conventional model, the electrons are heated in part by retreating sheaths. We present an analytical treatment of this phenomenon.Keywords
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