A UHV STM for in situ characterization of MBE/CVD growth on 4-inch wafers

• 1 March 1998
• journal article
• research article
• Published by Springer Nature in Applied Physics A
• Vol. 66  (7) , S993-S997
• https://doi.org/10.1007/s003390051282

Abstract

Keywords

• PACS: 07.79.C; 81.15.H